Chemical Vapor Deposition

$189.00
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Chemical Vapor Deposition

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Chemical Vapor Deposition

Chemical Vapor Deposition

  • Brand: Unbranded
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Chemical Vapor Deposition

1. Introduction. - 2. Thin Film Phenomena. - 3. Manufacturability. - 4. Chemical Equilibrium and Kinetics. - 5. Reactor Design for Thermal CVD. - 6. Fundamentals of Plasma Chemistry. - 7. Processing Plasmas and Reactors. - 8. CVD of Conductors. - 9. CVD of Dielectrics. - 10. CVD of Semiconductors. - 11. Emerging CVD Techniques. - AppendixVacuum Techniques for CVD. - A. 1 Fundamentals of Vaccum System Design. - A. 2 Typical Hardware Configurations. Language: English
  • Brand: Unbranded
  • Category: Education
  • Artist: Srinivasan Sivaram
  • Format: Paperback
  • Language: English
  • Publication Date: 2013/06/22
  • Publisher / Label: Springer
  • Number of Pages: 292
  • Fruugo ID: 450901291-950612076
  • ISBN: 9781475747539

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